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The measuring pressure causes a slight deflection of the ceramic diaphragm of the sensor. The pressureproportional change in capacitance is measured at the electrodes of the ceramic sensor. The ceramic sensor is
a dry sensor, i.e. no fill fluid is required for the pressure transfer. This makes the sensor completely suitable for
vacuums. Extremely high stability, comparable with the material Alloy, is achieved by using ultrapure
Ceraphire® as the ceramic.
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