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Wafer-carrier Mounting Photomicrosensors
EE-SPY801 / 802
Photomicrosensors for detecting wafer-carrier mounting.
The mounting position is set with a pedestal.
The contact surface with the wafer carrier uses a special chemical-resistant fluororesin.
The unique optical system enables stable detection of almost all wafer-carriers.
Light modulation effectively reduces external light interference.
Utilizes talc-free clean cables